Semiconductor and Electronics Manufacturing

The semiconductor and electronics manufacturing industry involves the production of semiconductors, a key component in Integrated Circuits (ICs), and the incorporation of semiconductors into electronic devices. This industry has seen rapid growth in the last few decades due to increasing demand for products such as smartphones, laptops, and other smart devices. Because of this high demand, as well as the constant development of new products and technologies, the industry is expected to continue growing into the future. Automation has revolutionized the means of semiconductor and electronics production, enabling manufacturers to increase efficiency, reduce costs, and improve end-product quality. Automated processes, such as robotic assemblies, wafer grinders, dicing machines, and other such equipment, have replaced manual labor, increased throughput immeasurably, and facilitated the production of more complex and innovative products.

To that end, Anaheim Automation is dedicated to providing the highest quality components on the market. For over 50 years, we have supplied our OEM customers in the semiconductor and electronics industries with the motion control devices they need to streamline their manufacturing processes and ensure precision, repeatability, and uniformity of their end products. Our ability to procure sample sizes for R&D projects, as well as our generous quantity discounts, and our customization and value-added service capabilities give customers the flexibility and cost savings they rely upon to meet demands and keep up with the competition.

Products for Semiconductor & Electronics Manufacturing

Stepper Motors and Drivers

Stepper Products are used in the semiconductor and electronics manufacturing industries for their precise positioning abilities. Steppers are found in a wide variety of applications, such as wafer stages and pick-and-place robots. Stepper drivers are used to control the speed and torque of the motor, ensuring that they operate accurately and reliably. They also enable the precise positioning of components during the manufacturing process, which is essential for avoiding errors and producing the highest quality products.

Steppers are highly reliable, relatively low-cost, and require minimal maintenance, making them an ideal choice for many semiconductor and electronics manufacturing applications. Anaheim Automation has a broad line of Stepper Motors in NEMA sizes ranging from 08 to 42, with holding torque rated for up to 5,700 oz-in and 1.8° and 0.9° full-step options. Multiple winding options are available for each frame size, and single-ended or double-ended shaft options are offered for each series. IP65 Rated Stepper Motors are available in frame sizes from NEMA 17 to NEMA 42 for applications requiring ingress protection against dirt, dust, debris, and low-pressure water jets.

Stepper Drivers can be programmed to control the motor's speed, acceleration, and torque profile, further improving precision and repeatability. Stepper drivers can also reduce the amount of energy required by the system, potentially lowering overall operation costs. Anaheim Automation carries a wide range of high-performance bipolar, unipolar, and line-powered stepper drivers in a variety of voltages, current ratings, and step resolutions. Single-axis and multi-axis units, as well as modular and enclosed packaging styles, are available, with rated currents from 0.2 to 12.5 Amps.

For easy installation, component compatibility, and minimized footprint, consider our Stepper Motors with Integrated Drivers and Stepper Motors with Integrated Drivers and Controllers. These convenient, compact designs are offered in frame sizes NEMA 17, NEMA 23, and NEMA 34. See the 17MD, 17MDSI, 23MD, 23MDSI, 34MD, and 34MDSI series for detailed product information. For applications that require high torque and low speeds, our Stepper Gearmotors combine a hybrid or permanent magnet (PM) stepper motor and either a spur or planetary gearbox into a single package. These units are available in NEMA 23 and NEMA 34 sizes, with a large range of gear ratios to choose from in each size.

All of our stepper products can be customized to include a brake, encoder, and/or cable and connector, even at small quantities. Further customizations such as shaft modifications, custom windings, private labeling, voltage matching, etc. are also available with a MOQ (Minimum Order Quantity).

Brushless DC

Due to their high efficiency, reliability, and precise speed control, Brushless DC products are widely used in the semiconductor and electronics manufacturing industries for a variety of applications, including wafer handling and component positioning. BLDC motors and controllers are also used in vacuum pumps, which are an essential part of the semiconductor manufacturing process. These pumps help to maintain a clean and controlled environment by removing unwanted particles and dust from the manufacturing area.

Anaheim Automation carries a wide variety of Brushless DC Motors available in several body styles with frame sizes from NEMA 09 to NEMA 48 and torque from 0.7 to 900 oz-in. IP65-sealed models are available in 57mm to 110mm frame sizes. Compatible Brushless DC Controllers are offered in enclosed open frame and board mountable styles, with input voltage ranges from 6 - 50VDC or 85 - 265VAC, peak power up to 2,000 Watts, and peak current up to 100 Amps. All of Anaheim Automation's BLDC controllers are manufactured in the USA, with the majority being designed and built in-house.

BLDC Motors with Integrated Speed Controllers are available in frame sizes NEMA 17, NEMA 23, and NEMA 34. These convenient units consist of a motor and matched driver mounted together into a single package, with power ratings from 23 to 704 Watts. These high-quality designs provide a clean look with less wiring, as well as cutting down on component selection time.

For applications requiring greater torque, both Planetary BLDC Gearmotors consisting of a round-bodied BLDC motor and an integrated planetary gearbox are offered in frame sizes of NEMA 09, NEMA 11, NEMA 17, and NEMA 23 with speeds from under 500RPM to 15,000RPM and peak torque ratings from 3 to 6,249 oz-in. Spur BLDC Gearmotors incorporate a round-bodied NEMA 23 or square-bodied NEMA 34 brushless motor and a spur gearbox. Rated speeds are from 21 to 1,333RPM, with peak torque ratings from 694 to 22,500 oz-in.

Anaheim Automation also provides a selection of BLDC Linear Actuators with Ball Screws. These robust, compact units yield high power density by integrating a ball screw into a 42mm (BLAW17 series) or 57mm (BLWA23 series) BLDC motor for versatile linear positioning applications.

Value-added services and custom solutions including shaft modifications, voltage optimization, etc., are available for the majority of Anaheim Automation's brushless DC products for an additional cost. An MOQ (minimum order quantity) may also be required.

Encoders

Encoders of all kinds are widely used in semiconductor and electronics manufacturing applications to provide system feedback. They are used to measure the position, speed, and direction of various components during the manufacturing process, ensuring precision and consistency, which are crucial to the quality of the final product. Encoders are also used in the testing and calibration of semiconductor manufacturing equipment to maintain accuracy and uniformity. With multiple product options offered in optical, magnetic, and capacitive styles, Anaheim Automation offers a broad selection of encoders for nearly any type of semiconductor application.

Our highly accurate Optical Rotary Encoders include single-ended, differential, and high-resolution incremental encoders. These units can be mounted to motor shafts anywhere from 0.59" to 1.0" in diameter and are able to track up to 200,000 CPS (Cycles Per Second) and 32 to 5,000 CPR (Cycles Per Revolution). Our rugged Magnetic Rotary Encoders are capable of tracking up to 200,000 CPS and 65,536 CPR and can be mounted to motor shafts from 0.125" to 1.125" in diameter. They also have an optional third index channel and either differential or open-collector output for U/V/W BLDC motor commutation. Our Magnetic Linear Encoders are available in resolutions of 5, 10, 25, and 50µm with linear travel speeds up to 16m/s and scale lengths up to 100m. They are also IP67 rated to protect against the ingress of dust, debris, liquids, and other contaminants, making them an excellent choice for applications in harsh environments. Capacitive Modular Encoders include the AMT10, AMT11S, and AMT11Q series which are able to track up to 4096 PPR (model dependent), and the AMT21 series of absolute encoders provide either 12 Bits or 14 Bits of absolute position information and can be mounted to motor shafts ranging from 2mm to 8mm in diameter.

HMIs and PLCs

The ability to monitor, control, and troubleshoot issues in semiconductor and electronics manufacturing machinery is essential. HMIs (Human Machine Interfaces), or "Industrial Touch Screens," provide a user-friendly graphical interface which allows the operator to interface with the machine via a touchscreen. Operators can conveniently control system operations from a single centralized location. With an HMI, it is also possible for users to access the terminal remotely, allowing them to control and monitor the system from a distance. Anaheim Automation's cost-effective HMIs include display screen sizes ranging from 4.3 inches to 15.0 inches, and are able to sustain complex, dynamic functions. Multiple programs, displayed on several customizable screens, can be run simultaneously. Specialty HMIs, including Water Resistant and Splash-Proof options, are available in screen sizes of 7", 10.1", and 10.4". For help with selecting the right HMI for your project, our HMI Application Form can help you narrow down the options.

Our HMIs are compatible with a variety of PLC (Programmable Logic Controller) brands, including Siemens, Schneider Electric, Allen Bradley, among many others, making it simple to integrate them into almost any system. Our powerful block-style PLCs in particular are easily connected to our HMIs. Complete our PLC Application Form to determine which unit is right for you application.

Our Integrated HMI/PLC line reduces wiring and footprint by combining the HMI and PLC into a single streamlined package. The 4.3" KNC-HMI-MK043E-20DT and 7.0" KNC-HMI-MK070E-33DT include all of the features of our standalone HMIs and PLCs for unmatched convenience and performance. The HMI runs a 700MHz CPU and includes 128MB Flash + 64MB DDR2 memory storage. A USB Host input is available for additional memory. The integrated PLC supports up to 33 I/O points (model dependent) plus up to eight KS series extension modules for even more I/O points.

Linear Guides and Linear Stages

Anaheim Automation's Linear Guides are ideal for providing accurate linear motion in semiconductor and electronics manufacturing applications. These rail and carriage, or "block," assemblies smoothly position tools and objects within the workspace. Our competitively priced linear guides are available in rail widths from 3mm to 63mm and rail lengths up to 4,000mm. For each rail width series, a variety of carriage options are offered in several heights, widths, and preload classes. Customers can also choose from multiple carriage seal options.

Another excellent option is our low-friction Screw-Driven Linear Stages. These linear actuators, available in X and XY configurations, are capable of bearing dynamic loads up to 6,700 lbs, with accuracies within 0.003 inches per foot and speed ranges up to 12 in/sec. Customers can choose between travel models from 6 to 18 inches, as well as various stepper motor, encoder, and/or cable options to meet the exact requirements of a given application. Our LS100 series models are economical designs ideal for light-duty projects under 20 lbs, minimizing physical size while still ensuring accurate positioning. LS500 models are intended for medium and heavy-duty applications up to 225 lbs.

Custom linear guides and linear actuators are available upon request. Please contact our applications engineers to discuss your requirements.

Common Applications

Wafer Manufacturing Equipment

Wafer Manufacturing Equipment – Wafer front end (WFE) equipment creates the wafers which will be used in the semiconductor manufacturing process. These wafers are thin slices of a purified crystalline material, typically silicon extracted from silica sand, that serve as the foundation for the fabrication of semiconductor chips and integrated circuits. Once a silicon ingot has been refined, it is sliced into a wafer with diamond-edged saw blades, then smoothed and polished to a mirror-like surface before being thoroughly cleaned of any remaining particles. Completed wafers are then thoroughly tested using automated probes.

Products for Wafer Equipment

Stepper Motors
Stepper motors are commonly used in WFE (Wafer Fabrication Equipment) to control the movement of various components, such as wafer handling systems, robotic arms, and precision stages. The precise and repeatable motion of stepper motors allows for accurate positioning and control, which is crucial in the manufacturing of semiconductor wafers. These motors are also known for their high torque and reliability, which makes them ideal for use in harsh industrial environments. Additionally, stepper motors can be easily interfaced with control systems.

Encoders
Encoders are used to precisely measure the position, speed, and direction of the wafer in the machine's processing chamber. This information is essential for controlling the various mechanical and chemical processes that take place during each step of wafer fabrication. Encoders help ensure that the wafer is accurately positioned at each stage of the manufacturing process, resulting in high-quality, reliable wafers.

Linear Stages
Linear stages are commonly used in WFE machines to precisely move wafers through various processes in a linear motion with very high accuracy, which is crucial for achieving high-quality results in the semiconductor manufacturing process. Linear stages are typically equipped with advanced sensors and control systems that enable them to maintain precise positioning and velocity control, even at high speeds.

Wafer Probing Machines

Wafer Probing Machines – Wafers must be tested prior to being sent to die preparation. Wafer probers are automated tools which use a series of probes to test and measure the electrical properties of the wafer. During electrical testing, a set of stationary probes (aka a probe card) create electrical contact with a wafer that is held in place by a vacuum-mounted wafer chuck. The wafer prober is equipped with automatic pattern recognition optics that ensure precise alignment between the contact pads on the wafer and the probe tips. Once a die or array of dies have completed a test, the prober moves the wafer to the next die or array to begin the next test.

Products for Wafer Probers

BLDC Motors
BLDC motors are commonly used in wafer probers due to their efficiency, reliability, precise control, and high torque capabilities. These motors precisely position the wafer under the probe needles, ensuring accurate testing.

Linear Guides
Linear guides are used in wafer probers to provide precise, smooth movement of the probe card assembly across the wafer. The rail provides a stable base for the carriage to move along, while the carriage holds the probe card assembly and moves it across the wafer. Linear guides ensure that the probe card assembly maintains a consistent and controlled distance from the wafer surface, which is critical for accurate testing of the semiconductor devices on the wafer. The guides also help prevent any unwanted movements or vibrations that could cause damage to the wafer or affect the accuracy of the test results.

PLCs
PLCs are used in wafer probers to control the prober's various mechanical and electrical components. These controllers execute a series of pre-programmed instructions that manage the movement of the prober's probes and wafers, as well as the collection and analysis of data. PLCs are ideal for wafer probers because they are reliable, flexible, and can be easily programmed to suit the specific needs of the testing process. They can also be easily integrated with other computer systems, such as data acquisition and analysis software, to provide a comprehensive testing solution. PLCs can also be used to monitor and regulate the prober's environmental conditions, such as temperature and humidity, to ensure optimal testing conditions which helps to ensure the accuracy and consistency of test results.